Experimental Validation of Ultra-Precision Nanopositioning System

High-Speed, Ultra-High-Precision Nanopositioning: A Signal Transformation Approach

Signal transformation is a novel strategy employed in feedback control to reduce the impact of measurement noise on positioning accuracy. This chapter addresses robustness issues of the method with respect to output disturbance and uncertainty in plant low frequency gain. The robustness problems can be solved by an inner loop with integral action before incorporating the signal transformation m...

Construction and control of an ultra-stiff nanopositioning system

This paper describes the design and manufacturing of a rigid positioning system with high resolution based on piezostepper technology. The planar piezostepper is able to move along the three in-plane directions and is able to make small correction movements in the out-of-plane directions. The piezostepper integrates the drive system, the transmission, and the bearing system into a single steppi...

Performance Specifications of Nanopositioning Systems : Accuracy , Precision , and Resolution

Parallel-kinematics Mems Stages for High Precision Nanopositioning and Manipulation

INTRODUCTION Micro Electro Mechanical Systems (MEMS) based micro-positioning stages are critically important in many micro/nano manipulation and manufacturing applications. Such stages have been extensively used in micro-force sensors, scanning probe microscopy and micro optical lens scanners [1-4]. While there is no unique definition for a micro-positioning stage, it generally refers to a syst...

Ultra-precision: enabling our future.

This paper provides a perspective on the development of ultra-precision technologies: What drove their evolution and what do they now promise for the future as we face the consequences of consumption of the Earth's finite resources? Improved application of measurement is introduced as a major enabler of mass production, and its resultant impact on wealth generation is considered. This paper ide...